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ORING KALREZ

0.984" x 1.262" x 0.139" (24.99 mm x 32.05 mm x 3.53 mm)
H&D SKU: 214K8002UP
Product Availability: On Back Order
$56.00

DESCRIPTION

Kalrez® 8002 is a clear, transparent compound targeted specifically for select semiconductor plasma and gas deposition applications. This unfilled compound offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled compounds. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength properties and is well suited for both static and low stress/low sealing force applications. A maximum continuous service temperature of 250°C (482°F) is suggested. Ultrapure post cleaning and packaging is standard for parts made from Kalrez® 8002. 

 

SEAL INFORMATION

CLICK HERE TO SEE KALREZ® 8002 DATA SHEET  PDF Logo

Products specifications
ID (Inch) 0.984
OD (Inch) 1.262
Height (Inch) 0.139
ID (Metric) 24.99
OD (Metric) 32.05
Height (Metric) 3.53
Alternate Product Codes