DESCRIPTION
Kalrez® 8002 is a clear, transparent compound targeted specifically for select semiconductor plasma and gas deposition applications. This unfilled compound offers ultra-low particle generation in oxygen and fluorine-based plasmas versus mineral-filled compounds. Kalrez® 8002 exhibits excellent resistance to dry process chemistry, has good mechanical strength properties and is well suited for both static and low stress/low sealing force applications. A maximum continuous service temperature of 250°C (482°F) is suggested. Ultrapure post cleaning and packaging is standard for parts made from Kalrez® 8002.
SEAL INFORMATION
CLICK HERE TO SEE KALREZ® 8002 DATA SHEET 