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ORING KALREZ

1.975" x 2.395" x 0.210" (50.17 mm x 60.83 mm x 5.33 mm)
H&D SKU: 329K9500
Product Availability : On Back Order
$185.51
$185.51

DESCRIPTION

DuPont™ Kalrez® 9500 perfluoroelastomer parts are a tan product targeted specifically for deposition processes where ozone is used for processing, e.g. SACVD, PECVD UV-cure chamber, PECVD ultra-low K (BLOK™) and ash/strip processes. It has been specifically designed for use in applications where the plasma environment is more “chemical”, i.e., where oxygen and fluorine radicals are more dominant. 

Kalrez® 9500 exhibits excellent resistance to CVD and ash/strip process chemistry, i.e., ozone, ammonia and water vapor. It also offers outstanding thermal stability, very low outgassing and excellent mechanical strength and is well suited for both static and dynamic sealing applications. A maximum continuous service temperature of 310 ?C is suggested. Kalrez® 9500 can also withstand short-term excursions up to 325 ?C. Ultrapure post-cleaning and packaging is standard for all Kalrez® 9500 parts. 

 

SEAL INFORMATION

CLICK HERE TO SEE KALREZ® 9500 DATA SHEET  PDF Logo

Products specifications
ID (Inch) 1.975
OD (Inch) 2.395
Height (Inch) 0.210
ID (Metric) 50.17
OD (Metric) 60.83
Height (Metric) 5.33